Certified Micralign Series are 1:1 scanning projection aligners specifically designed to meet the production requirements of integrated circuit manufacturing, as well as non-semiconductor applications for up to 150-mm wafers. Micralign incorporates a field proven optical system and automation features to provide a large scanning field size, large depth of focus and high throughput. By scanning the full field, the entire wafer is exposed in one scan, eliminating the need for stitching when exposing large devices.
We provide fully refurbished Micralign® and spare-parts for the 200, 300, 500, 600 and 700 series.
For further details please do not hesitate to contact us .
You can find furhter informations about our spare-part-lists here .
